Methods for forming assemblies and multi-chip modules including stacked semiconductor dice

ABSTRACT

An assembly method that includes providing a first semiconductor device and positioning a second semiconductor device at least partially over the first semiconductor device is disclosed. Spacers space the active surface of the first semiconductor device substantially a predetermined distance apart from the back side of the second semiconductor device. Discrete conductive elements are extended between the active surface of the first semiconductor device and the substrate prior to positioning of the second semiconductor device. Intermediate portions of the discrete conductive elements pass through an aperture formed between the active surface of the first semiconductor device, the back side of the second semiconductor device, and two of the spacers positioned therebetween. Assemblies and packaged semiconductor devices that are formed in accordance with the method are also disclosed.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.12/354,059, filed Jan. 15, 2009, now U.S. Pat. No. 8,237,290, issuedAug. 7, 2012, which is a divisional of application Ser. No. 11/416,803,filed May 3, 2006, now U.S. Pat. No. 7,492,039, issued Feb. 17, 2009,which is a divisional of U.S. patent application Ser. No. 10/923,450,filed Aug. 19, 2004, now U.S. Pat. No. 7,276,790, issued Oct. 2, 2007,which claims the benefit of the filing date of Singapore PatentApplication No. 200404317-1, filed Jul. 29, 2004, the disclosure of eachof which is hereby incorporated herein in its entirety by thisreference.

BACKGROUND

1. Field of the Invention

The present invention relates generally to semiconductor deviceassemblies, or so-called “multi-chip modules,” and, more specifically,to multi-chip modules in which two or more semiconductor devices arestacked relative to one another. In particular, the present inventionrelates to stacked semiconductor device assemblies in which thedistances between adjacent, stacked semiconductor devices aredetermined, at least in part, by a plurality of discrete spacersinterposed therebetween, and discrete conductive elements protrude froma central region of the lower semiconductor device and pass through acommon aperture formed between the active surface of the lowersemiconductor device, the back side of the upper semiconductor deviceand two of the spacers.

2. Background of Related Art

In order to conserve the amount of surface area, or “real estate,”consumed on a carrier substrate, such as a circuit board, bysemiconductor devices connected thereto, various types of increaseddensity packages have been developed. Among these various types ofpackages is the so-called “multi-chip module” (MCM). Some types ofmulti-chip modules include assemblies of semiconductor devices that arestacked one on top of another. The amount of surface area on a carriersubstrate that may be saved by stacking semiconductor devices is readilyapparent—a stack of semiconductor devices consumes roughly the sameamount of real estate on a carrier substrate as a single, horizontallyoriented semiconductor device or semiconductor device package.

Due to the disparity in processes that are used to form different typesof semiconductor devices (e.g., the number and order of various processsteps), the incorporation of different types of functionality into asingle semiconductor device has proven very difficult to actually reduceto practice. Even in cases where semiconductor devices that carry outmultiple functions can be fabricated, multi-chip modules that includesemiconductor devices with differing functions (e.g., memory, processingcapabilities, etc.) are often much more desirable since the separatesemiconductor devices may be fabricated independently and laterassembled with one another much more quickly and cost-effectively (e.g.,lower production costs due to higher volumes and lower failure rates).

Multi-chip modules may also contain a number of semiconductor devicesthat perform the same function, effectively combining the functionalityof all of the semiconductor devices thereof into a single package.

An example of a conventional, stacked multi-chip module includes acarrier substrate, a first, larger semiconductor device secured to thecarrier substrate, and a second, smaller semiconductor device positionedover and secured to the first semiconductor device. The secondsemiconductor device does not overlie bond pads of the firstsemiconductor device and, thus, the second semiconductor device does notcover bond wires that electrically connect bond pads of the firstsemiconductor device to corresponding contacts or terminals of thecarrier substrate. As the bond pads of each lower semiconductor deviceare not covered by the next higher semiconductor device, verticalspacing between the semiconductor devices is not required. Thus, anysuitable adhesive may be used to secure the semiconductor devices to oneanother. Such a multi-chip module is disclosed and illustrated in U.S.Pat. No. 6,212,767, issued to Tandy on Apr. 10, 2001 (hereinafter “the'767 Patent”). Notably, since the sizes of the semiconductor devices ofsuch a multi-chip module must continue to decrease as they arepositioned increasingly higher in the stack, the obtainable heights ofsuch multi-chip modules and the number of semiconductor devices that maybe placed therein is severely limited.

Another example of a conventional multi-chip module is described in U.S.Pat. No. 5,323,060, issued to Fogal et al. on Jun. 21, 1994 (hereinafter“the '060 Patent”). The multi-chip module of the '060 Patent includes acarrier substrate with semiconductor devices disposed thereon in astacked arrangement. The individual semiconductor devices of eachmulti-chip module may be the same size or different sizes, with uppersemiconductor devices being either smaller or larger than underlyingsemiconductor devices. Adjacent semiconductor devices of each of themulti-chip modules disclosed in the '060 Patent are secured to oneanother with an adhesive layer. The thickness of each adhesive layerwell exceeds the loop heights of wire bonds protruding from asemiconductor device upon which that adhesive layer is to be positioned.Accordingly, the presence of each adhesive layer prevents the back sideof an overlying, upper semiconductor device from contacting bond wiresthat protrude from an immediately underlying, lower semiconductor deviceof the multi-chip module. The adhesive layers of the multi-chip modulesdisclosed in the '060 Patent do not encapsulate or otherwise cover anyportion of the bond wires that protrude from any of the lowersemiconductor devices. It does not appear that the inventors named onthe '060 Patent were concerned with overall stack heights. Thus, themulti-chip modules of the '060 Patent may be undesirably thick due tothe use of thick spacers or adhesive structures between each adjacentpair of semiconductor devices, resulting in wasted adhesive andexcessive stack height.

A similar but more compact multi-chip module is disclosed in U.S. Pat.No. Re. 36,613, issued to Ball on Mar. 14, 2000 (hereinafter “the '613Patent”). The multi-chip module of the '613 Patent includes many of thesame features as those disclosed in the '060 Patent, including adhesivelayers of carefully controlled thicknesses that space verticallyadjacent semiconductor devices apart a greater distance than the loopheights of wire bonds protruding from the lower of the adjacent dice.The use of thinner bond wires with low-loop profile wire bondingtechniques permits adjacent semiconductor devices of the multi-chipmodule disclosed in the '060 Patent to be positioned more closely to oneanother than adjacent semiconductor devices of the multi-chip modulesdisclosed in the '060 Patent. Nonetheless, an undesirably large amountof additional space may remain between the tops of the bond wiresprotruding from one semiconductor device and the back side of the nexthigher semiconductor device of such a stacked multi-chip module.

The vertical distance that adjacent semiconductor devices of a stackedtype multi-chip module are spaced apart from one another may be reducedby arranging the immediately underlying semiconductor devices, such thatupper semiconductor devices are not positioned over bond pads ofimmediately lower semiconductor devices or bond wires protrudingtherefrom. Thus, adjacent semiconductor devices may be spaced apart fromone another a distance that is about the same as or less than the loopheights of the wire bonds that protrude above the active surface of thelower semiconductor device. U.S. Pat. No. 6,051,886, issued to Fogal etal. on Apr. 18, 2000 (hereinafter “the '886 Patent”), discloses such amulti-chip module. According to the '886 Patent, wire bonding is notconducted until all of the semiconductor devices of such a multi-chipmodule have been assembled with one another and with the underlyingcarrier substrate. The semiconductor devices of the multi-chip modulesdisclosed in the '886 Patent must have bond pads that are arranged onopposite peripheral edges. Semiconductor devices with bond padspositioned adjacent the entire peripheries thereof could not be used inthe multi-chip modules of the '886 Patent. This is a particularlyundesirable limitation due to the ever-increasing feature density ofstate-of-the-art semiconductor devices, which is often accompanied by asubsequent need for an ever-increasing number of bond pads onsemiconductor devices.

Conventionally, when a particular amount of spacing is needed betweensemiconductor devices to separate discrete conductive elements, such asbond wires, that protrude above an active surface of one semiconductordevice from the back side of the next higher semiconductor device, thesemiconductor devices of stacked multi-chip modules have been separatedfrom one another with preformed spacers. Exemplary spacers that havebeen used in stacked semiconductor device arrangements have been formedfrom dielectric-coated silicon (which may be cut from scrapped dice) ora polyimide film. An adhesive material typically secures such a spacerbetween adjacent semiconductor devices. The use of such preformedspacers is somewhat undesirable since an additional alignment andassembly step is required for each such spacer. If silicon spacers areemployed, an adhesive must be applied to both surfaces thereof, andprior passivation of the spacer surfaces may be required to preventshorting between two adjacent devices. Proper alignment of a preformedspacer with a semiconductor device requires that a spacer not bepositioned over bond pads of the semiconductor device.

Another example of a conventional MCM is disclosed in U.S. Pat. No.6,569,709 to Derderian (hereinafter “the '709 Patent”), the disclosureof which is incorporated in its entirety by reference herein. Morespecifically, the '709 Patent discloses, as shown in FIG. 1 hereof, aconventional assembly 10 including a substrate 20 with two semiconductordevices 30A, 30B (collectively referred to as “semiconductor devices30”) positioned thereover in stacked arrangement.

The depicted substrate 20 of the '709 Patent is an interposer with anumber of bond pads, which are referred to herein as contact areas 24,through which electrical signals are input to or output fromsemiconductor devices 30 carried upon a surface 22 of substrate 20. Eachcontact area 24 corresponds to a bond pad 34 on an active surface 32 ofone of the semiconductor devices 30 positioned upon substrate 20.

A first semiconductor device 30A is secured to substrate 20.Peripherally located bond pads 34 of first semiconductor device 30Acommunicate with corresponding contact areas 24 of substrate 20 by wayof discrete conductive elements 38A. A second semiconductor device 30Bis positioned over, or “stacked,” on first semiconductor device 30A. Aback side 35 of second semiconductor device 30B is electrically isolatedfrom discrete conductive elements 38A. Second semiconductor device 30Bis secured to first semiconductor device 30A by way of an adhesiveelement 36 interposed between and secured to active surface 32 of firstsemiconductor device 30A and back side 35 of second semiconductor device30B. The adhesive element 36 may comprise a thermoplastic resin, athermoset resin, or an epoxy. The MCM is conventionally covered with aprotective encapsulant. Since conventional multi-chip modules may beaffixed to one another with a continuous adhesive element withmechanical properties e.g., modulus of elasticity, coefficient ofthermal expansion (CTE), etc., which do not precisely correspond to themechanical properties of the semiconductor devices or encapsulantmaterials, stresses, such as thermal stresses, may develop between thesemiconductor devices. CTE mismatch between the adhesive element andencapsulant material can lead to delamination of components of theassembly and, specifically, of delamination along the interface betweena transfer molded encapsulant of the assembly and the mass, or “pillow,”of adhesive element 36.

A further conventional MCM configuration is disclosed in U.S. Pat. No.6,531,784 to Shim et al. Particularly, in the disclosed “stacked-die”embodiment, a second die has been mounted on top of the first die withelongated spacer strips. Conductive wires are bonded to correspondingterminal pads on the first die, channeled through a corresponding groovein a corresponding spacer strip, then bonded to a corresponding one ofthe terminal pads on the substrate. The spacer strips serve to captivatethe bonding wires and keep them separated from one another and thesurfaces of the dice. The elongated shape of the spacer strip increasesthe surface area contact of the die and spacer, leading to problems fromCTE mismatch.

In view of the foregoing, it appears that a method for forming stackedsemiconductor device assemblies that reduces the likelihood of damage tosemiconductor devices and associated wire bonds, as well as providesflexibility in bond pad number and placement on the semiconductordevices of the assembly, would be useful.

BRIEF SUMMARY

The present invention, in a number of exemplary embodiments, includessemiconductor device assemblies, as well as a method for assemblingsemiconductor devices in a stacked arrangement.

In one aspect of the present invention, a semiconductor device assemblyincludes a first semiconductor device with a plurality of spacersarranged over an active surface thereof, a second semiconductor devicepositioned at least partially over the first semiconductor device, anddiscrete conductive elements protruding over at least a portion of theactive surface, and extending through at least one common apertureformed between the spacers, the active surface of the firstsemiconductor die, and the back side of the second semiconductor device.The spacers are of a height that spaces the first and secondsemiconductor devices apart from one another by a distance substantiallythe same as a predetermined distance that maintains electrical isolationbetween the discrete conductive elements protruding over the activesurface of the first semiconductor device and the back side of thesecond semiconductor device while minimizing the height of the assembly.

The semiconductor device assembly may also include a substrate, such asa circuit board, an interposer, another semiconductor device, or leads,that includes contact areas to which bond pads of at least the first,lowermost, semiconductor device are electrically connected.

The discrete conductive elements that protrude above the active surfaceof the first semiconductor device may be electrically connected tocorresponding contact areas of a substrate, such as a circuit board, aninterposer, another semiconductor device, or leads. Alternatively, thediscrete conductive elements may themselves comprise leads e.g., in aleads-over-chip (LOC) type arrangement with the first semiconductordevice.

Portions, or all, of the semiconductor device assembly may beencapsulated. For example, the first and second semiconductor devices,as well as portions of a substrate, if any, that are located adjacent tothe first semiconductor device and discrete conductive elementsextending between those portions of a substrate and the first and secondsemiconductor devices, may be partially or fully covered with anencapsulant.

One embodiment of a method for forming an assembly according to thepresent invention includes providing a first semiconductor device,applying or forming spacers to protrude at least partially over anactive surface thereof, and positioning a second semiconductor deviceover the spacers. Alternatively, the spacers may be applied to or formedon a back side of the second semiconductor device before placing thesecond semiconductor device over the first semiconductor device.

Various types of materials, including, without limitation, epoxies,silicones, silicone-carbon resins, polyimides, and polyurethanes, may beused to form the spacers. Spacers may comprise an adhesive tape that maybe cut to a desired segment shape and adhered to the semiconductor die.In a further alternative, spacers may be formed upon the semiconductordie by stereolithography or photolithography techniques as known in theart.

The height of the spacers is selected to space the first and secondsemiconductor devices a distance substantially the same as apredetermined distance apart from one another. The spacers areconfigured to support the second semiconductor device positioned thereonwhile maintaining electrical isolation between the back side of thesecond semiconductor device and the discrete conductive elements thatprotrude over the active surface of the first semiconductor device.

Prior to placement of the second semiconductor device, discreteconductive elements, for example, wire bonds, are placed or formedbetween the bond pads of the first semiconductor device andcorresponding contact areas of the substrate. Intermediate portions ofthe discrete conductive elements pass through an aperture formed betweenthe active surface of the first semiconductor device, the back side ofthe second semiconductor device, and two of the spacers. The discreteconductive elements may be electrically connected to correspondingcontact areas of a substrate, such as a circuit board, an interposer,another semiconductor device, or leads. Alternatively, the discreteconductive elements may themselves comprise leads e.g., in aleads-over-chip (LOC) type arrangement with the first semiconductordevice.

In the event that the height of the spacers will cause the back side ofthe second semiconductor device to rest upon discrete conductiveelements protruding above the active surface of the first semiconductordevice, it is preferred that the back side of the second semiconductordevice and the discrete conductive elements be electrically isolatedfrom one another, for example, by way of a dielectric (e.g., polymermaterial, oxide, nitride, etc.) coating on at least portions of the backside of the second semiconductor device that contact discrete conductiveelements, a dielectric coating on at least portions of the discreteconductive elements that contact the back side, or some combinationthereof.

Of course, assemblies incorporating teachings of the present inventionmay include more than two semiconductor devices in a stackedarrangement.

Once the semiconductor devices of such an assembly have been assembledwith one another and electrically connected with a substrate or with oneanother, the assembly may be packaged by encapsulation as known in theart using, for example, transfer molding, injection molding, pot moldingor stereolithographic techniques.

Other features and advantages of the present invention will becomeapparent to those of skill in the art through consideration of theensuing description, the accompanying drawings, and the appended claims.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view of a schematic representation of aconventional semiconductor die assembly;

FIG. 2A is a perspective assembly view of one embodiment of an assemblyof the present invention;

FIG. 2B is a perspective assembly view of another embodiment of anassembly of the present invention;

FIG. 2C is a perspective assembly view of another embodiment of anassembly of the present invention;

FIGS. 2D(A)-2D(H) are partial perspective views of semiconductor dicehaving differently configured spacers secured to a surface thereof;

FIGS. 2E-2L are plan views of semiconductor dice having spacers securedto the surfaces thereof in different locations;

FIGS. 3A-3E are schematic representations depicting fabrication of theassembly depicted in FIG. 3F;

FIG. 3F is a schematic representation of one embodiment of an assemblyincorporating teachings of the present invention;

FIG. 4 is a cross-sectional representation of another embodiment of anassembly of the present invention;

FIG. 5 is a perspective view of another embodiment of an assembly of thepresent invention;

FIG. 6A is a perspective view of another embodiment of an assembly ofthe present invention;

FIG. 6B is a cross-sectional representation of the assembly depicted inFIG. 6A;

FIG. 7 is a perspective assembly view of yet another embodiment of anassembly of the present invention;

FIG. 8A is a schematic representation of a portion of another embodimentof a semiconductor assembly of the present invention; and

FIG. 8B is a schematic representation of a portion of yet anotherembodiment of a semiconductor assembly of the present invention.

DETAILED DESCRIPTION

Generally, the present invention contemplates that spacers may bedisposed between adjacent semiconductor devices comprising an MCM.Further, the active surfaces of both of the adjacent semiconductordevices may be oriented in substantially the same direction. Also, thesemiconductor device having an active surface directly facing a backside of the adjacent semiconductor device may include centrally locatedbond pads that are wire bonded to a substrate. Such a configuration mayprovide an MCM with improved flexibility and reliability. As usedherein, the term “semiconductor device” includes, for example, asemiconductor die of silicon, gallium arsenide, indium phosphide orother semiconductive material configured as a processor, logic, memoryor other function, wherein integrated circuitry is fabricated on anactive surface of the die while part of a wafer or other bulksemiconductor substrate that is later “singulated” to form a pluralityof individual semiconductor dice.

In one exemplary embodiment of the present invention, FIG. 2A shows aperspective view of a semiconductor device 130 having bond pads 134 andgenerally rectangular spacers 150A disposed proximate the four cornersof semiconductor device 130 on the active surface 129 thereof. Spacers150A may each include an upper surface 151A, which are configured forabutting against the back side of another semiconductor devicesuperimposed over semiconductor device 130.

Spacers 150A may comprise a tape having an adhesive layer on each sidethereof, which may be cut to a desired segment shape and adhered to theactive surface 129 of semiconductor device 130. Alternatively, spacers150A may be formed by depositing a hardenable or curable paste or gel ofdielectric material upon the active surface 129 using a dispensingnozzle or a stencil. In a further alternative, spacers 150A may beformed upon the active surface 129 of semiconductor device 130 bystereolithography or photolithography techniques as known in the art. Instereolithographic techniques suitable for such an application, a liquidUV-wavelength light sensitive polymer, also known as a photoimageablematerial, on the active surface is selectively cured by exposure to alaser beam of appropriate wavelength at desired spacer locations, theprocess being repeated for higher spacers to provide multilayerstructures. The spacers 150A may thus be formed from photoimageablematerial, and may be formed as at least two superimposed, contiguous,mutually adhered layers of material. Such an operation may be desirablyperformed at the wafer level, prior to die singulation.Photolithographic techniques involve, for example, application of alayer of dielectric material such as a polyimide to the active surfaceof a wafer (by, for example, spraying or spin-coating), followed bymasking with a photoresist, selective exposure of the photoresist toprotect the dielectric material at the spacer location, and subsequentetching of the dielectric material at unprotected locations.Alternatively, photolithography may be used to form spacers fromphotoresist material itself at desired locations by application of thephotoresist followed by selective exposure through a mask.

Semiconductor device 130 may comprise any one of various known types ofsemiconductor devices, including memories (such as DRAMs, SRAMs, flashmemories, EPROMs, EEPROMs, etc.), microprocessors, application specificintegrated circuits (ASICs), digital signal processors (DSPs) and thelike.

Side region 140 of semiconductor device 130 may be sized and configuredto encompass the lateral extent of the area on which bond pads 134 arepositioned. Put another way, bond pads 134 may lie in an area bounded bythe innermost corners, in relation to the center of semiconductor device130, of each of spacers 150A. As shown in FIG. 2A, bond pads 134 may bearranged and oriented in a single, linear row along an axis locatedgenerally through the center of the semiconductor device 130. However,it is understood that the present invention may be implemented using asemiconductor chip having bond pads that are configured in a variety ofpatterns and having any number of bond pads 134, such as the bond pads134″ in FIG. 2C, which are shown in a parallel, centrally locateddouble-row formation or, alternatively, as shown in FIG. 2B, which showsa semiconductor device 130′ including both central and peripheral bondpads 134′.

Spacers 150A may have a height, “Z,” which is configured for allowingwire bonds (not shown) to extend, for example, from bond pads 134 towardeither of side regions 140 and 142 but without exceeding the height “Z.”Such a configuration may allow for placement of another semiconductordie (not shown), adjacent and superimposed above active surface 129 ofsemiconductor device 130 without contacting wire bonds (not shown) thatmay extend from centrally located bond pads 134 toward either of sideregions 140 or 142.

In another exemplary embodiment according to the present inventiondepicted in FIG. 2B, semiconductor device 130′ may comprise bond pads134′ and substantially cylindrical spacers 150B disposed proximate thefour corners of semiconductor device 130′ on the active surface 129′thereof. Spacers 150B may each include an upper surface 151B, which areconfigured for abutting against the back side of another semiconductordevice superimposed over semiconductor device 130′.

As shown in FIG. 2B, bond pads 134′ may be arranged and oriented in asingle, linear row along an axis located generally through the center ofthe semiconductor device 130′ as well as along the periphery ofsemiconductor device 130′ adjacent both side regions 138 and 136 ofsemiconductor device 130′. Accordingly, side region 140′ between spacers150B from the active surface 129′ of semiconductor device 130′ to height“Z” of spacers 150B may be sized and configured for passing discreteconductive elements in the form of wire bonds (not shown) extending fromat least one of bond pads 134′ to a position exceeding the periphery ofthe semiconductor device 130′. Similarly, side region 142′ betweenspacers 150B from the active surface 129′ of semiconductor device 130′to height “Z” of spacers 150B may be sized and configured for passingwire bonds (not shown) extending from at least one of bond pads 134′ toa position exceeding the periphery of the semiconductor device 130′.Further, side region 138 between spacers 150B from the active surface129′ of semiconductor device 130′ to height “Z” of spacers 150B may besized and configured for passing wire bonds (not shown) extending fromat least one of bond pads 134′ to a position exceeding the periphery ofthe semiconductor device 130′. Also, side region 136 between spacers150B from the active surface 129′ of semiconductor device 130′ to height“Z” of spacers 150B may be sized and configured for passing wire bonds(not shown) extending from at least one of bond pads 134′ to a positionexceeding the periphery of the semiconductor device 130′. As explainedin more detail hereinbelow, wire bonds may extend to a common substratethat is sized and configured for electrical connection of the MCM toother devices.

FIG. 2C shows an exploded view of a semiconductor device assembly 90including a first semiconductor device 132A and a second semiconductordevice 132B, which are configured to be superimposed adjacent oneanother and affixed to one another to form an MCM according to thepresent invention. However, as shown in FIG. 2C, substantiallycylindrical spacers 150B are disposed on the back side 135B of secondsemiconductor device 132B. Spacers 150B may each include a lower surface151C, which are configured for abutting against the active surface 129Aof first semiconductor device 132A. Thus, spacers may be applied to orformed on the active surface of the first semiconductor die, on the backside of the second semiconductor die, or at least one spacer may beapplied to or formed on both the active surface of the firstsemiconductor die and on the back side of the second semiconductor die,without limitation.

The present invention contemplates that there are many geometricconfigurations for spacers 150. For instance, although spacers 150B aredepicted in FIG. 2C and in FIG. 2D(H) as having a substantiallycylindrical shape, more generally, spacers 150 may alternatively beconfigured as pillars having a rectangular cross-section FIG. 2D(A),pillars of triangular cross-section FIG. 2D(B), truncated pyramids FIG.2D(C), truncated cones FIG. 2D(D), truncated curved cones FIG. 2D(E),elongated strips FIGS. 2D(F) and 2D(G) and cylindrical cross-sectionFIG. 2D(H). As shown in FIG. 2D(A-H), spacers 150 may include a surface151 for matingly engaging an active surface or back side of anothersemiconductor device (not shown). Spacers 150 alternatively may beformed by dispensing dots. The surface 151 of spacers 150 formed bydispensing dots may be rounded or include a projecting tail. Spacers 150may be positioned on an active surface 129 of semiconductor device 132or a back side 135 thereof, without limitation.

Furthermore, the present invention also contemplates a multitude of bondpad and spacer arrangements. By way of example, and not to limit thescope of the present invention, FIGS. 2E-2L illustrate various exemplaryarrangements of spacers 150 on the active surface 129 of a semiconductordevice in relation to bond pads 134. In FIG. 2E, two substantiallycylindrical spacers 150 are located near adjacent corners 155, and athird spacer 150 is located between corners 155 on the oppositeperipheral edge 157 of the semiconductor device. In FIG. 2F, a spacer150 is located near each of the four corners 155 of active surface 129.Only two cylindrical spacers 150 are used in the embodiment of FIG. 2G,each spacer 150 being positioned adjacent opposite peripheral edges 157of the semiconductor device on opposite peripheral edges 157 of thecentrally located rows of bond pads 134. Of course, the diameter of thecylinders may be greater than the lateral dimensions of spaces of otherarrangements, to provide adequate stability for the upper semiconductordevice. FIGS. 21 and 2J illustrate the use of spacers 150 with generallytriangular and generally square cross-sections, respectively, positionedat corners 155 of active surface 129. In FIG. 2H, four elongated spacers150 are shown, two spacers 150 each being located adjacent to a portionof and parallel with one peripheral edge 157 of the semiconductor deviceand the other two spacers 150 being similarly located adjacent to theopposite peripheral edge 157 of the semiconductor device. FIGS. 2K and2L illustrate other orientations of elongated spacers 150. In FIG. 2K,the two elongated spacers 150 are positioned adjacent and parallel toopposite peripheral edges 157 of the semiconductor device. The fourelongated spacers 150 depicted in FIG. 2L are positioned to extend froma location adjacent corners 155 diagonally toward the center of activesurface 129 of the semiconductor device. Although the spacers 150 shownin FIGS. 2E-2L are shown as being positioned on the active surface 129of a lower semiconductor device, the present invention also contemplatesthat spacers 150 may be positioned on the back side of an uppersemiconductor device, as shown in FIG. 2C.

Thus, it may be appreciated that the bond pads on the active surface ofthe semiconductor device may be configured in relationship to the sizeand position of the spacers, as illustrated by FIGS. 2E-2L for providingsufficient accessibility to those bond pads positioned centrally. Inmore detail, at least one of the side regions of a multi-chip module,assuming the disposition of two semiconductor devices superimposed withrespect to one another and separated by spacers positioned therebetween,may be sized for providing a common aperture, respectively, for ingressand egress of discrete conductive elements for electrical connection toother electrical components, such as, for instance, the connection padsof an interposer. Specifically, at least one common aperture along aperipheral edge or side region may be sized and configured foraccommodating a plurality of wire bonds extending therethrough and,optionally to the connection pads of an interposer.

Although the spacers 150 shown in FIGS. 2E-2L are shown as beingpositioned on the active surface 129 of a semiconductor device forproviding an aperture for ingress and egress of discrete conductiveelements, the present invention also contemplates, as shown in FIG. 8A,that spacers 850 may be farmed over the discrete conductive elements 838following electrical connection. Spacers 850 may be positioned over bondpads 834 of first semiconductor device 830A, and second semiconductordevice 830B is positioned over the first semiconductor device 830A inrelation thereto by spacers 850. Alternatively, as shown in FIG. 8B,second semiconductor device 830B′ may be positioned in relation to firstsemiconductor device 830A′ by spacers 850′. Spacers 850′ may be formedover the discrete conductive elements 838′ and positioned adjacent bondpads 834′ of first semiconductor device 830A′.

As described hereinabove, the present invention may provide relativelygreat flexibility in the arrangement of the bond pads of a semiconductordevice over which another semiconductor die is superimposed. Anotheraspect of a multi-chip module arrangement of the present invention maybe particularly desirable, as discussed below.

A multi-chip module according to the present invention may developthermal stresses of lower magnitudes because direct affixation betweenstacked semiconductor dice may be limited to the mechanical coupling dueto the interposed spacers. Since conventional multi-chip modules may beaffixed to one another with a continuous layer of adhesive withmechanical properties (e.g., modulus of elasticity, coefficient ofthermal expansion, etc.) that do not precisely correspond to themechanical properties of the semiconductor devices, stresses, such asthermal stresses, may develop between the semiconductor devices. Itshould be noted that the present invention does not preclude the use ofadditional structure to affix the stacked semiconductor devices, suchas, for example, introduction of a dielectric underfill layertherebetween. In such an instance, the spaced relationship of thestacked semiconductor devices and the open spaces between the spacers atthe periphery of the assembly provides more than adequate space toaccommodate expansion or contraction of the interposed dielectricmaterial while it is curing or otherwise hardening.

Turning now to FIGS. 3A-3E, an exemplary method for fabricating assembly110 is illustrated.

As shown in FIG. 3A, a substrate 120, in this case an interposer, isprovided. Of course, the use of other types of substrates, such ascircuit boards, semiconductor devices, leads, and the like, inassemblies and assembly methods incorporating teachings of the presentinvention are also within the scope of the present invention.Accordingly, substrate 120 may be formed from silicon, glass, ceramic,an organic material (e.g., FR-4 or FR-5 resin laminate), metal (e.g.,copper, aluminum, etc.), or any other suitable material. Contact areas124, shown in the form of bond pads, are arranged on surface 122 ofsubstrate 120 adjacent to a semiconductor device supporting region 123of surface 122.

Next, as shown in FIG. 3B, first semiconductor device 130A is positionedon and secured to supporting region 123 of surface 122 by way of firstadhesive element 126. By way of example, first adhesive element 126 maycomprise an adhesive-coated structure, such as a polyimide film, or aquantity of adhesive material (e.g., thermoset resin, thermoplasticresin, epoxy, etc.). Discrete conductive elements 138A, depicted as bondwires in FIG. 3B, are formed or placed as well known in the art using awire bond capillary between bond pads 134 of first semiconductor device130A and their corresponding contact areas 124 of substrate 120.

FIG. 3C illustrates that two or more spacers 150A may then be positionedupon the active surface 129 of the first semiconductor device 130A. Forinstance, a volume of adhesive may be applied in a predetermined volumeto form a spacer 150A, the adhesive at least partially unconsolidated(e.g., liquid, paste, gel, etc.) on active surface 129 of firstsemiconductor device 130A. Upon curing, the predetermined quantity ofadhesive material may cause a subsequently positioned secondsemiconductor device 130B (FIG. 3D) to be spaced a distancesubstantially the same as a predetermined distance apart from firstsemiconductor device 130A. However, the second semiconductor device 130Bmay be positioned over the first semiconductor device 130A prior tocuring of the adhesive material if the adhesive material in an uncuredstate provides adequate mechanical support and, therefore, curing of theadhesive material may be used to affix the first semiconductor device130A to the second semiconductor device 130B.

As may be appreciated, a suitable adhesive material may preferably havesufficient viscosity or surface tension to resist excessive spreading orflowing off of the active surface 129 of the first semiconductor device130A. However, the viscosity of adhesive material may permit a quantitythereof to spread out somewhat when placed on active surface 129, butwhile remaining relatively thick. By way of example only, adhesivematerial may comprise an epoxy, a silicone, a silicone-carbon resin, apolyimide, an acrylate or a polyurethane. Some suitable dielectricadhesive materials are those available from LOCTITE®/HENKEL®, formerlyDexter Corporation of Industry, California, and are known as QUANTUM dieattach and thermal adhesives. Other suppliers of suitable dielectricadhesive materials include Ablestik, Hitachi, Sumitomo, and AdvancedApplied Adhesive. A suitable polyimide is polyamideimide (PAI), markedunder the trademark TORLON® by Amoco Corporation. Another suitablepolyimide is Bismaleimide (BMI).

Alternatively, a so-called double-sided tape comprising a dielectricfilm having an adhesive applied to each side thereof may be employed toform spacers 150A. For instance, discrete pieces of double-sided tapemay be placed upon the active surface 129 of first semiconductor device130A. The thickness “Z” of the double-sided tape may be selected so thatthe back side of the second semiconductor device 130B will not contactthe discrete conductive elements 138A. Such a configuration may reduceor prevent electrical shorting of the discrete conductive elements 138Awith one another or with the back side of the second semiconductordevice 130B.

It should also be appreciated that spacers 150A may be formed on theactive surface 129 of first semiconductor device 130A prior to formationof discrete conductive elements 138A. Thus, the size and position ofspacers 150A may be selected so as to not interfere with formation ofdiscrete conductive elements 138A. For instance, the size and positionof spacers 150A may be selected so as to not interfere with a wire bondcapillary as employed in a wire bonding process. Such a process sequencemay reduce manufacturing cycle times by enabling simultaneous formationof spacers on a number of semiconductor devices (for example, bystereolithography, photolithography, stenciling, etc., while thesemiconductor devices are still at the wafer level. In addition, asillustrated in FIG. 2C, alternatively, spacers may be disposed on theback side of the second semiconductor device 130B.

As depicted in FIG. 3D, second semiconductor device 130B may be alignedwith and positioned over first semiconductor device 130A in asubstantially parallel, planar relationship thereto and placed uponspacers 150A. For instance, a pick-and-place device may be used toalign, position and place second semiconductor device 130B upon spacers150A. The second semiconductor device 130B may be substantially the samesize as the first semiconductor device 130A resulting in a same/similarsize die stack as depicted in FIG. 3D. Alternatively, the secondsemiconductor device 130B may be smaller than the first semiconductordevice 130A, resulting in a pyramid die stack. Additionally, it will beappreciated that an inverted pyramid stack may be formed, the secondsemiconductor device 130B being larger than the first semiconductordevice 130A.

Optionally, prior to assembly of second semiconductor device 130B withfirst semiconductor device 130A, discrete conductive elements 138A maybe at least partially insulated with a dielectric coating. Such coatingmay be effected by dispensing a low viscosity dielectric material overdiscrete conductive elements 138A, by forming a dielectric coatingthereover using stereolithography, or by other suitable techniques. Atleast partially encapsulating or insulating discrete conductive elements138A, particularly the portions thereof proximate to the back side ofsecond semiconductor device 130B, may inhibit or prevent electricalshorting or other undesirable electrical communications.

More generally, back side 135 of second semiconductor device 130B may beelectrically isolated from discrete conductive elements 138A that extendabove the active surface 129 of first semiconductor device 130A by beingspaced apart therefrom, by dielectric coating on at least contactingportions of one or both of discrete conductive elements 138A and backside 135, or by any combination of spacing and dielectric coating(s). Adielectric coating may be easily formed on the back side 135 using, forexample, spin coating of a polyimide, oxidation or nitridation of thesemiconductor material of the back side 135, application of anadhesive-coated dielectric film, or other known technique.

First semiconductor device 130A and second semiconductor device 130B aresubstantially spaced a set distance apart from one another, which setdistance may or may not be equal to the predetermined distance,depending upon whether or not spacers 150A expand or contract uponcuring or hardening. Of course, thermoplastic adhesive materials mayharden upon cooling, while other types of adhesive materials may becured in a manner that depends upon the type of curable adhesivematerial employed and result in at least somewhat resilient structures.By way of example only, snap curing processes, heat curing processes,chemical (in situ) curing, UV curing processes, microwave curingprocesses, or any suitable combination thereof (e.g., UV curing anexposed, outer portion of adhesive material, then heat curing theinterior portions thereof) may be used to cure a spacer 150A comprisinga curable adhesive material to at least a semisolid state.

Next, as shown in FIG. 3E, discrete conductive elements 138B, again wirebonds by way of example, may be positioned between bond pads 134 ofsecond semiconductor device 130B and corresponding contact areas 124 ofsubstrate 120 to electrically connect bond pads 134 and contact areas124.

Once bond pads 134 of second semiconductor device 130B are incommunication with their corresponding contact areas 124 of substrate120, a protective encapsulant 40 may be placed over all or part ofsubstrate 120, first semiconductor device 130A, and/or secondsemiconductor device 130B. FIG. 3F shows a protective encapsulant 40over part of substrate 120, first semiconductor device 130A, and secondsemiconductor device 130B. By way of example only, protectiveencapsulant 40 may comprise a pot or transfer molded package, as shownin FIG. 3F, a stereolithographically fabricated package, or glob-toptype overcoat. As noted previously, a dielectric underfill material maybe introduced between semiconductor devices 130A and 130B after assemblythereof. Of course, known materials and processes may be used to formprotective encapsulant 40. In the molded package example, protectiveencapsulant 40 may be formed from a transfer molding compound (e.g., atwo-part silicon particle-filled epoxy) using known transfer moldingprocesses, which may employ thermoset resins or thermoplastic polymers,or pot-molded using a thermosetting resin or an epoxy compound. In thestereolithography example, protective encapsulant 40 may comprise aplurality of at least partially superimposed, contiguous, mutuallyadhered material layers. For example, each layer may be formed byselectively curing (e.g., with a UV laser) regions of a layer ofphotocurable (e.g., UV curable) material, as known in thestereolithography art. When protective encapsulant 40 is a glob top,suitable glob-top materials (e.g., epoxy, silicone, silicone-carbonresin, polyimide, polyurethane, etc.) may be dispensed, as known in theart, to form protective encapsulant 40.

Protective encapsulant 40 may flow between first semiconductor device130A and second semiconductor device 130B and around discrete conductiveelements 138A. Such encapsulant disposed about discrete conductiveelements 138A may electrically isolate discrete conductive elements 138Afrom back side 135 of second semiconductor device 130B.

An MCM assembly according to the present invention will next bedescribed with continued reference to FIGS. 3E and 3F. The depictedsubstrate 120 is an interposer with a number of bond pads, which arereferred to herein as contact areas 124, through which electricalsignals are input to or output from semiconductor devices 130 carriedupon or adjacent to a surface 122 of substrate 120. Each contact area124 corresponds to a bond pad 134 on an active surface 129 of one of thesemiconductor devices 130 positioned upon substrate 120.

As shown in FIG. 3E, a first semiconductor device 130A may be secured tosubstrate 120 by way of a first adhesive element 126, such as a quantityof an appropriate thermoset resin, a quantity of pressure sensitiveadhesive, an adhesive-coated film or tape, or the like. Bond pads 134 offirst semiconductor device 130A communicate with corresponding contactareas 124 of substrate 120 by way of discrete conductive elements 138A,such as the illustrated bond wires, tape-automated bond (TAB) elementscomprising traces carried on a flexible dielectric film, otherthermocompression bonded leads, and other known types of conductiveelements. However, at least one of the bond pads 134 of the firstsemiconductor device 130A may be located centrally.

Second semiconductor device 130B may be positioned over, or “stacked”on, first semiconductor device 130A. A back side 135 of secondsemiconductor device 130B may be electrically isolated from discreteconductive elements 138A either by being spaced apart therefrom or byway of dielectric coatings on at least portions of discrete conductiveelements 138A that may contact back side 135. Alternatively, back side135 may include dielectric coatings on at least portions thereof thatcontact discrete conductive elements 138A. Second semiconductor device130B may be secured to first semiconductor device 130A by way of spacers150A interposed between and secured to active surface 129 of firstsemiconductor device 130A and back side 135 of second semiconductordevice 130B. By way of example only, spacers 150A may comprise athermoplastic resin, a thermoset resin, an epoxy, or any other suitablematerial that, upon at least partial curing, will adhere to andsubstantially maintain the desired relative positions of first andsecond semiconductor devices 130A, 130B.

Of course, optionally and as previously noted, the space between firstsemiconductor device 130A and second semiconductor device 130B may beunderfilled, as known in the art. Known underfill materials (e.g.,thermoset resins, two-stage epoxies, etc.) may be used. For example,liquid encapsulant material sold as WE707 by Kulicke & Soffa Industriesof Willow Grove, Pa., and similar materials sold by Dexter Corporationas QMI 536 may be used.

Bond pads 134 of second semiconductor device 130B may be electricallyconnected to corresponding contact areas 124 of substrate 120 by way ofdiscrete conductive elements 138B. Discrete conductive elements 138B maycomprise the aforementioned bond wires, TAB elements, otherthermocompression bonded leads, or any other known type of discreteconductive element for extending between and establishing the desiredcommunication between a bond pad 134 and its corresponding contact area124.

Assembly 110 may also include a plurality of discrete externalconnective elements 114 carried by substrate 120 and in electricalcommunication with contact areas 124 through vias (not shown) and traces(not shown) of substrate 120, such as the depicted solder balls,conductive pins, conductive lands or any other conductive structuresthat are suitable for interconnecting assembly 110 with other, externalelectronic components. Finally, assembly 110 may be encapsulated asdepicted in FIG. 3F, using any suitable protective encapsulant 40.

In another aspect of the present invention, as illustrated in FIG. 4, anassembly 110 may include more than two semiconductor devices 130. Eachadditional semiconductor device 130 may be added to assembly 110 in amanner similar to that described in reference to FIGS. 3D and 3E. Itshould also be appreciated that the present invention contemplates morethan three semiconductor devices in a stacked arrangement.

In a further aspect of the present invention, by employing the spacersof the present invention, two or more side apertures formed between theopposing surfaces of stacked semiconductor devices may provide access tobond pads of one of the stacked semiconductor devices.

For instance, FIG. 5 shows a perspective view of an assembly 210according to the present invention wherein a first semiconductor device230A may be secured to substrate 220 by way of a first adhesive element226, such as a quantity of an appropriate thermoset resin, a quantity ofpressure sensitive adhesive, an adhesive-coated film or tape, or thelike. A second semiconductor device 230B, which may be substantiallyidentical to first semiconductor device 230A, may be positioned over, or“stacked” on, first semiconductor device 230A. Discrete conductiveelements 238A access bond pads 234A through the side apertures formedbetween the opposing surfaces of the semiconductor devices 230A, 230B.

Spacers 250 may be positioned proximate each corner of and between firstsemiconductor device 230A and second semiconductor device 230B. Spacers250 may comprise a quantity of an appropriate thermoset resin, aquantity of pressure sensitive adhesive, an adhesive-coated film ortape, or the like. Accordingly, spacers 250 may position firstsemiconductor device 230A in relation to second semiconductor device230B. Further, spacers 250 may affix first semiconductor device 230A tosecond semiconductor device 230B.

A back side 235 of second semiconductor device 230B may be electricallyisolated from discrete conductive elements 238B either by being spacedapart therefrom or by way of dielectric coatings on at least portions ofdiscrete conductive elements 238B that may potentially contact oneanother. Alternatively, back side 235 may include dielectric coatings onat least portions thereof that may potentially contact discreteconductive elements 238A.

As shown in FIG. 5, bond pads 234B of second semiconductor device 230Bmay be electrically connected to corresponding contact areas 224 ofsubstrate 220 by way of discrete conductive elements 238B. Discreteconductive elements 238B may comprise the aforementioned bond wires, TABelements, other thermocompression bonded leads, or any other known typeof discrete conductive element for extending between and establishingthe desired communication between a bond pad 234B and its correspondingcontact area 224. The present invention may accommodate various bond padconfigurations. As shown in FIG. 5, bond pads 234B comprise bothcentrally located bond pads 234B as well as peripherally located bondpads 234A.

Generally, the present invention contemplates that at least two discreteconductive elements may share a common aperture formed between twosemiconductor devices. Discrete conductive elements 238A of firstsemiconductor device 230A may extend from bond pads 234A and through acommon side aperture formed between discrete spacers 250, the activesurface of the first semiconductor device 230A and the back side 235 ofthe second semiconductor device 230B for communication withcorresponding contact areas 224 of substrate 220.

Thus, the present invention provides a configuration wherein conductiveelements may extend from centrally positioned bond pads of asemiconductor device over which another semiconductor device ispositioned through at least one common aperture formed between spacers,the active surface of the semiconductor die over which anothersemiconductor device is positioned, and the back side surface of theanother semiconductor device. Alternatively, it may be advantageous toprovide a plurality of peripheral or side apertures for the ingress andegress of discrete conductive elements, such as wire bonds.

For instance, FIGS. 6A and 6B show another embodiment of the invention,multi-chip module 211. Centrally located bond pads (not shown) on firstsemiconductor device 230A are electrically connected to correspondingcontact areas 224A of substrate 220 by way of discrete conductiveelements 238A. The discrete conductive elements 238A pass betweenspacers 250. A common aperture exists between spacers 250, the activesurface of the first semiconductor device 230A, and the back side 235 ofsecond semiconductor device 230B. Centrally located bond pads 234B ofsecond semiconductor device 230B are electrically connected tocorresponding contact areas 224B (FIG. 6B) of substrate 220 by way ofdiscrete conductive elements 238B. Contact areas 224A and 224B arearranged on the substrate 220 adjacent opposing sides of firstsemiconductor device 230A, allowing electrical isolation betweendiscrete conductive elements 238A and 238B.

FIG. 7 depicts an exploded perspective view of another embodiment of theinvention, multi-chip module 310. Multi-chip module 310 includes a firstsemiconductor device 330A affixed to substrate 320, and a secondsemiconductor device 330B. The second semiconductor device 330B ispositioned over the first semiconductor device 330A and is positioned inrelation thereto by spacers 350, which extend from the back side ofsecond semiconductor device 330B to the active surface of the firstsemiconductor device 330A. Additionally, each peripheral region of amulti-chip module 310, as shown in FIG. 7, encompasses two or morediscrete conductive elements 338A, which pass through the apertureformed between spacers 350, the active surface of the firstsemiconductor device 330A and the back side of second semiconductordevice 330B. Moreover, the bond pads of the first semiconductor device330A are arranged in both the central region and the peripheral regionof the active surface of the first semiconductor device 330A. Contactareas 324 are arranged adjacent each side of first semiconductor device330A. Centrally located bond pads 334A and peripheral bond pads 334B areelectrically connected by way of discrete conductive elements 338A tocorresponding contact areas 324 of substrate 320.

As will be appreciated by those of ordinary skill in the art, thepresent invention conserves material in comparison to adhesive “pillow”spacing techniques and avoids CTE mismatch problems associated with theinterface between the adhesive and transfer mold compound along theinterface therebetween, reduces the volume of material required as wellas the number of process steps in comparison to the use of silicon orother preformed spacers requiring application of an adhesive thereto andprovides an extremely flexible, simple yet robust packaging method andresulting end product.

Although the foregoing description contains many specifics, these shouldnot be construed as limiting the scope of the present invention, butmerely as providing illustrations of some exemplary embodiments.Similarly, other embodiments of the invention may be devised that do notdepart from the scope of the present invention. Features from differentembodiments may be employed in combination. The scope of the inventionis, therefore, indicated and limited only by the appended claims andtheir legal equivalents, rather than by the foregoing description. Alladditions, deletions, and modifications to the invention, as disclosedherein, which fall within the meaning and scope of the claims are to beembraced thereby.

What is claimed is:
 1. A method for forming an assembly including semiconductor devices in stacked arrangement, the method comprising: attaching a first semiconductor device including an active surface to a surface of a substrate; disposing a plurality of discrete spacers on the active surface of the first semiconductor device; extending a plurality of discrete conductive elements between a plurality of bond pads positioned in a central region of the active surface of the first semiconductor device and the substrate, comprising: extending the plurality of discrete conductive elements from the plurality of bond pads over the active surface of the first semiconductor device; extending a portion of the plurality of discrete conductive elements through a common aperture formed between two of the plurality of discrete spacers on a first side of the first semiconductor device; extending a remaining portion of the plurality of discrete conductive elements through another common aperture formed between two of the plurality of discrete spacers on a second, opposing side of the first semiconductor device; extending another plurality of discrete conductive elements from a plurality of peripherally located bond pads on the active surface of the first semiconductor device to the surface of the substrate, comprising: extending a portion of the another plurality of discrete conductive elements through a third common aperture formed between two of the plurality of discrete spacers on a third side of the first semiconductor device; extending a remaining portion of the another plurality of discrete conductive elements through a fourth common aperture formed between two of the plurality of discrete spacers on a fourth side of the first semiconductor device opposing the third side; positioning a second semiconductor device having a back side over the first semiconductor device; attaching the back side of the second semiconductor device to the plurality of discrete spacers; and electrically isolating the plurality of discrete conductive elements from the back side of the second semiconductor device.
 2. A method for forming an assembly including semiconductor devices in stacked arrangement, the method comprising: attaching a first semiconductor device including an active surface to a surface of a substrate; disposing a plurality of discrete spacers on the active surface of the first semiconductor device; positioning each spacer of the plurality of discrete spacers at a peripheral corner of the active surface of the first semiconductor device; extending a plurality of discrete conductive elements between a plurality of bond pads positioned in a central region of the active surface of the first semiconductor device and the substrate, comprising: extending the plurality of discrete conductive elements from the plurality of bond pads over the active surface of the first semiconductor device; extending a portion of the plurality of discrete conductive elements through a common aperture formed between two of the plurality of discrete spacers on a first side of the first semiconductor device; and extending a remaining portion of the plurality of discrete conductive elements through another common aperture formed between two of the plurality of discrete spacers on a second, opposing side of the first semiconductor device; positioning a second semiconductor device having a back side over the first semiconductor device; attaching the back side of the second semiconductor device to the plurality of discrete spacers; and electrically isolating the plurality of discrete conductive elements from the back side of the second semiconductor device.
 3. The method of claim 2, further comprising encapsulating the first semiconductor device, the second semiconductor device, the plurality of discrete conductive elements, and at least a portion of the substrate.
 4. The method of claim 2, further comprising extending at least one of the plurality of discrete conductive elements through at least one discrete spacer of the plurality of discrete spacers.
 5. The method of claim 2, further comprising extending another plurality of discrete conductive elements from a plurality of peripherally located bond pads on the active surface of the first semiconductor device through a third common aperture formed between two of the plurality of discrete spacers on a third side of the first semiconductor device to the surface of the substrate.
 6. The method of claim 2, wherein electrically isolating the plurality of discrete conductive elements from the back side of the second semiconductor device comprises at least partially encapsulating the plurality of discrete conductive elements.
 7. The method of claim 2, further comprising attaching the plurality of discrete spacers to the back side of the second semiconductor device; and attaching the plurality of discrete spacers protruding from and attached to the back side of the second semiconductor device directly to and in direct contact with the active surface of the first semiconductor device.
 8. The method of claim 2, wherein attaching the first semiconductor device to the surface of the substrate comprises attaching the first semiconductor device to one of a circuit board, an interposer, another semiconductor device, and leads.
 9. The method of claim 2, wherein extending the plurality of discrete conductive elements comprises at least one of wire bonding bond pads to the substrate, tape-automated bonding bond pads to the substrate, and thermocompression bonding leads to bond pads and the substrate.
 10. The method of claim 2, further comprising extending the plurality of discrete conductive elements to a plurality of contact areas on the surface of the substrate.
 11. The method of claim 10, further comprising extending a second plurality of discrete conductive elements from an active surface of the second semiconductor device to a second plurality of contact areas on the surface of the substrate.
 12. The method of claim 2, further comprising encapsulating at least portions of the first semiconductor device, the second semiconductor device, the plurality of discrete conductive elements, and the substrate.
 13. The method of claim 12, wherein encapsulating comprises one of transfer molding, pot molding, and glob-top encapsulation.
 14. The method of claim 12, wherein encapsulating comprises forming a plurality of at least partially superimposed, contiguous, mutually adhered material layers.
 15. The method of claim 14, further comprising forming the plurality of at least partially superimposed, contiguous, mutually adhered material layers from a photocurable material. 